Structures embedded within core material and methods of manufacturing thereof

ABSTRACT

Embodiments of the present disclosure provide a method that comprises providing a first die having a surface comprising a bond pad to route electrical signals of the first die and attaching the first die to a layer of a substrate. The method further comprises forming one or more additional layers of the substrate to embed the first die in the substrate and coupling a second die to the one or more additional layers, the second die having a surface comprising a bond pad to route electrical signals of the second die. The second die is coupled to the one or more additional layers such that electrical signals are routed between the first die and the second die.

CROSS REFERENCE TO RELATED APPLICATIONS

The present disclosure is a divisional of and claims priority to U.S.patent application Ser. No. 13/184,304, filed Jul. 15, 2011, now U.S.Pat. No. 8,618,654, issued Dec. 31, 2013, which claims priority to U.S.Provisional Patent Application No. 61/368,555, filed Jul. 28, 2010, andU.S. Provisional Patent Application 61/366,136, filed Jul. 20, 2010;which is a continuation-in-part and claims priority to U.S. patentapplication Ser. No. 13/049,550, filed Mar. 16, 2011, now U.S. Pat. No.8,338,934, issued Dec. 25, 2012, which claims priority to U.S.Provisional Patent Application No. 61/315,319, filed Mar. 18, 2010;which are incorporated herein by reference.

TECHNICAL FIELD

Embodiments of the present disclosure relate to the field of integratedcircuits, and more particularly, to techniques, structures, andconfigurations of structures embedded within a substrate, as well aspackaging arrangements that incorporate such structures embedded withina substrate.

BACKGROUND

The background description provided herein is for the purpose ofgenerally presenting the context of the disclosure. Work of thepresently named inventors, to the extent it is described in thisbackground section, as well as aspects of the description that may nototherwise qualify as prior art at the time of filing, are neitherexpressly nor impliedly admitted as prior art against the presentdisclosure.

Typically, with many multi-chip packaging arrangements, the packagingarrangement is arranged in one of either a package-on-package (POP)arrangement, or a multi-chip module (MCM) arrangement. Both packagingarrangements are generally fairly thick with heights of up to 2.6millimeters. Additionally, with the MCM arrangement, one of the chipswithin the arrangement is often an integrated circuit configured withone or more System-on-Chips (SoCs), while the other chip is often sometype of memory device. Heat from the processors within the SoCsgenerally adversely affects the performance of the memory device.

SUMMARY

In various embodiments, the present disclosure provides a methodcomprising providing a first die having a surface comprising a bond padto route electrical signals of the first die and attaching the first dieto a layer of a substrate. The method further comprises forming one ormore additional layers of the substrate to embed the first die in thesubstrate and coupling a second die to the one or more additionallayers, the second die having a surface comprising a bond pad to routeelectrical signals of the second die. The second die is coupled to theone or more additional layers such that electrical signals are routedbetween the first die and the second die.

The present disclosure also provides an apparatus comprising a substratehaving (i) a first laminate layer, (ii) a second laminate layer, and(iii) a core material that is disposed between the first laminate layerand the second laminate layer. The apparatus also comprises a first diecoupled to the first laminate layer, the first die including a surfacecomprising a bond pad to route electrical signals of the first die,wherein the first die is embedded in the core material of the substrate.The apparatus further comprises a second die coupled to the secondlaminate layer, the second die having a surface comprising a bond pad toroute electrical signals of the second die. The second die is coupled tothe second laminate layer such that electrical signals are routedbetween the first die and the second die.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present disclosure will be readily understood by thefollowing detailed description in conjunction with the accompanyingdrawings. To facilitate this description, like reference numeralsdesignate like structural elements. Embodiments herein are illustratedby way of example and not by way of limitation in the figures of theaccompanying drawings.

FIGS. 1A-D schematically illustrate an example packaging arrangementthat includes an example die arrangement including a die embedded in asubstrate.

FIGS. 2A-D schematically illustrate another example packagingarrangement that includes another example die arrangement including twodies embedded in a substrate.

FIG. 3A schematically illustrates another example packaging arrangementthat includes another example die arrangement including two diesembedded in a substrate.

FIG. 3B schematically illustrates another example packaging arrangementthat includes another example die arrangement including four diesembedded in a substrate.

FIG. 4 schematically illustrates an example die arrangement including adie embedded in a substrate.

FIG. 5 schematically illustrates a die and an interposer prior to beingcoupled together.

FIG. 6 schematically illustrates a die arrangement subsequent toattaching a die and an interposer to a layer of a substrate.

FIGS. 7-11 schematically illustrate a die arrangement subsequent toforming one or more additional layers of the substrate to embed the diein the substrate.

FIG. 12 is a process flow diagram of a method to fabricate a packagearrangement described herein.

DETAILED DESCRIPTION

FIG. 1A illustrates a packaging arrangement 100 that includes a diearrangement 102 having a first die 104 embedded within a substrate 106.In accordance with various embodiments, the first die 104 is a memorydevice and, in accordance with an embodiment, the first die 104 is adynamic random access memory (DRAM). However, other types of memorydevices may be utilized. For clarity, many of the components within diearrangement 102 are not described. The die arrangement 102 will bedescribed in more detail herein with respect to FIGS. 4-11.

A second die 108 is coupled to the die arrangement 102. The second die108 includes a bond pad 110. The second die 108 is coupled to the diearrangement 102 via solder balls 112 such that the bond pad 110 of thesecond die 108 is communicatively coupled with a bond pad 114 of thefirst die 104 via routing structures 128, 130 and 132. Thus, electricalsignals can be routed between the first die 104 and the second die 108.The second die 108 is also coupled to the die arrangement 102 via thesolder balls 112 such that the bond pad 110 is communicatively coupledwith routing structures 126 and 134 via routing structures 128, 130 and132 to route electrical signals to devices external to packagingarrangement 100. In accordance with various embodiments, the second die108 is configured to include one or more System-on-Chips (SoCs).

In accordance with the various embodiments, underfill material 116 isprovided between the second die 108 and the die arrangement 102. Theunderfill material 116 provides protection of the joints formed by thesolder balls 112. Referring to FIG. 1B, in accordance with variousembodiments, the underfill material 116 is not included. Generally, thelarger the size of the solder balls 112, the less need there is forunderfill material 116.

Referring to FIGS. 1A and 1B, in accordance with various embodiments, aheat sink 118 is included. The heat sink 118 can be coupled to the diearrangement 102 via a suitable adhesive such as, for example, an epoxy.Additionally, a heat transfer compound 120 is utilized to couple theheat sink 118 to the second die 108. The heat transfer compound 120 isgenerally a metal filled resin glue, while the heat sink 118 isgenerally comprised of, for example, aluminum or copper. In accordancewith various embodiments, the heat sink 118 is only coupled to thesecond die 108 via the heat transfer compound 120 and is not coupled tothe die arrangement 102.

FIG. 1C illustrates an embodiment of the packaging arrangement 100wherein the packaging arrangement 100 does not include a heat sink 118,and therefore, does not include the heat transfer compound 120. In theembodiment illustrated in FIG. 1C, underfill material 116 is includedbetween the second die 108 and the die arrangement 102. FIG. 1Dillustrates an embodiment of the packaging arrangement 100 that does notinclude the heat sink 118, and therefore, does not include the heattransfer compound 120, and also does not include the underfill material116 between the second die 108 and the die arrangement 102.

FIG. 2A illustrates a packaging arrangement 200 that is similar to thepackaging arrangement 100. The packaging arrangement 200 includes twofirst dies 204 a, 204 b embedded within a die arrangement 202 that issimilar to die arrangement 102. As can be seen in FIG. 2A, the two firstdies 204 a, 204 b are embedded within the die arrangement 202 in aside-by-side relationship. In accordance with various embodiments, thefirst dies 204 a, 204 b are memory devices and, in accordance with anembodiment, the first dies 204 a, 204 b are dynamic random access memory(DRAM). However, other types of memory devices may be utilized.

A second die 208 is coupled to the die arrangement 202. The second die208 includes a bond pad 210. The second die 208 is coupled to the diearrangement 202 via solder balls 212 such that the bond pad 210 of thesecond die 208 is communicatively coupled with a bond pad 214 a of thefirst die 204 a and a bond pad 214 b of the first die 204 b via routingstructures 228, 230 and 232. Thus, electrical signals can be routedbetween the first dies 204 a, 204 b and the second die 208. The seconddie 208 is also coupled to the die arrangement 202 via the solder balls212 such that the bond pad 210 is communicatively coupled with routingstructures 226 and 234 via routing structures 228, 230 and 232 to routeelectrical signals to devices external to packaging arrangement 200. Inaccordance with various embodiments, the second die 208 is configured toinclude one or more System-on-Chips (SoCs).

In accordance with the various embodiments, underfill material 216 isprovided between the second die 208 and the die arrangement 202. Theunderfill material 216 provides protection of the joints formed by thesolder balls 212. Referring to FIG. 2B, in accordance with variousembodiments, the underfill material 216 is not included.

Referring to FIGS. 2A and 2B, in accordance with various embodiments, aheat sink 218 is included. The heat sink 218 can be coupled to the diearrangement 202 via a suitable adhesive such as, for example, an epoxy.Additionally, a heat transfer compound 220 is utilized to couple theheat sink 218 to the second die 208. The heat transfer compound 220 isgenerally a metal filled resin glue, while the heat sink 218 isgenerally comprised of, for example, aluminum or copper. In accordancewith various embodiments, the heat sink 218 is only coupled to thesecond die 208 via the heat transfer compound 220 and is not coupled tothe die arrangement 202.

FIG. 2C illustrates an embodiment of the packaging arrangement 200wherein the packaging arrangement 200 does not include a heat sink 218,and therefore, does not include the heat transfer compound 220. In theembodiment illustrated in FIG. 2C, underfill material 216 is includedbetween the second die 208 and the die arrangement 202. FIG. 2Dillustrates an embodiment of the packaging arrangement 200 that does notinclude the heat sink 218, and therefore, does not include the heattransfer compound 220, and also does not include the underfill material216 between the second die 208 and the die arrangement 202.

FIG. 3A illustrates a packaging arrangement 300 that is similar topackaging arrangements 100 and 200. The packaging arrangement 300includes two first dies 304 a, 304 b embedded within a die arrangement302 that is similar to die arrangements 102 and 202. As can be seen inFIG. 3A, the two first dies 304 a, 304 b are embedded within the diearrangement 302 in a stacked arrangement, as opposed to a side-by-sidearrangement. In accordance with various embodiments, the first dies 304a, 304 b are memory devices and, in accordance with an embodiment, thefirst dies 304 a, 304 b are dynamic random access memory (DRAM).However, other types of memory devices may be utilized.

The two first dies 304 a, 304 b are generally combined into a singledevice utilizing a through substrate via (TSV) arrangement and thenembedded within a substrate 306. The two first dies 304 a, 304 b eachinclude a bond pad 314 a, 314 b, respectively. Through vias 322 areprovided for first die 304 a.

A second die 308 is coupled to the die arrangement 302. The second die308 includes a bond pad 310. The second die 308 is coupled to the diearrangement 302 via solder balls 312 such that the bond pad 310 of thesecond die 308 is communicatively coupled with the bond pad 314 b of thefirst die 304 b via routing structures 328, 330 and 332. The second die308 is also coupled to the die arrangement 302 via solder balls 312 suchthat the bond pad 310 is coupled with the through vias 322 via routingstructures 328, 330 and 332 and thus, communicatively coupled with thebond pad 314 a of the first die 304 a. Thus, electrical signals can berouted between the first dies 304 a, 304 b and the second die 308. Thesecond die 308 is also coupled to the die arrangement 302 via the solderballs 312 such that the bond pad 310 is communicatively coupled withrouting structures 326 and 334 via routing structures 328, 330 and 332to route electrical signals to devices external to packaging arrangement300. In accordance with various embodiments, the second die 308 isconfigured to include one or more System-on-Chips (SoCs).

FIG. 3A illustrates the arrangement including underfill material 316between the second die 308 and the die arrangement 302. However, as withother embodiments described herein, the underfill material 316 may beeliminated if desired. Likewise, while FIG. 3A illustrates the packagingarrangement 300 including a heat sink 318 and heat transfer compound320, the heat sink 318 and heat transfer compound 320 may be eliminated,as previously described herein with respect to other embodiments, ifdesired.

FIG. 3B illustrates a packaging arrangement 300 that includes a diearrangement 302 that includes four first dies 304 a-d. Two of the firstdies 304 a, b are arranged in a stacked relationship, while the othertwo first dies 304 c, 304 d are also arranged in a stacked relationship.In accordance with various embodiments, the first dies 304 a-d arememory devices and, in accordance with an embodiment, the first dies 304a-d are dynamic random access memory (DRAM). However, other types ofmemory devices may be utilized.

Two first dies 304 a, 304 b are generally combined into a single deviceutilizing a TSV arrangement and then embedded within a substrate 306.The two first dies 304 a, 304 b each include a bond pad 314 a, 314 b,respectively. Through vias 322 a are provided for the first die 304 a.The other two first dies 304 c, 304 d are generally combined into asingle device utilizing a TSV arrangement and then embedded within thesubstrate 306. The two first dies 304 c, 304 d each include a bond pad314 c, 314 d, respectively. Through vias 322 c are provided for thefirst die 304 c.

A second die 308 is coupled to the die arrangement 302. The second die308 includes a bond pad 310. The second die 308 is coupled to the diearrangement 302 via solder balls 312 such that the bond pad 310 of thesecond die 308 is communicatively coupled with the bond pad 314 b of thefirst die 304 b and the bond pad 314 d of the first die 314 d viarouting structures 328, 330 and 332. The second die 308 is also coupledto the die arrangement 302 via solder balls 312 such that the bond pad310 is coupled with the through vias 320 a via routing structures 328,330 and 332. and thus, communicatively coupled with the bond pad 314 aof the first die 304 a. The second die 308 is also coupled to the diearrangement 302 via solder balls 312 such that the bond pad 310 iscoupled with the through vias 320 b via routing structures 328, 330 and332 and thus, communicatively coupled with the bond pad 314 c of thefirst die 304 c. Thus, electrical signals can be routed between thefirst dies 304 a-d and the second die 308. The second die 308 is alsocoupled to the die arrangement 302 via the solder balls 312 such thatthe bond pad 310 is communicatively coupled with routing structures 326and 334 via routing structures 328, 330 and 332 to route electricalsignals to devices external to packaging arrangement 300. In accordancewith various embodiments, the second die 308 is configured to includeone or more System-on-Chips (SoCs).

FIG. 3B illustrates the arrangement including underfill material 316between the second die 308 and the die arrangement 302. However, as withother embodiments described herein, the underfill material 316 may beeliminated if desired. Likewise, while FIG. 3B illustrates the packagingarrangement 300 including a heat sink 318 and heat transfer compound320, the heat sink 318 and heat transfer compound 320 may be eliminated,as previously described herein with respect to other embodiments, ifdesired.

FIG. 4 schematically illustrates an example die arrangement 400 thatincludes a die 402 embedded in a substrate 460. The die arrangement 400can be utilized to implement die arrangement 102, 202 and 302 previouslydescribed herein with respect to FIGS. 1A-D, 2A-D and 3A-B.

The substrate 460 includes a first laminate layer 416, a second laminatelayer 420, and a core material 418 disposed between the first laminatelayer 416 and the second laminate layer 420. The first laminate layer116 and/or the second laminate layer 420 can include a laminate materialsuch as, for example, epoxy/resin based materials. In some embodiments,the laminate material includes Flame Retardant 4 (FR4) orBismaleimide-Triazine (BT). The core material 418 can include, forexample, a resin. In some embodiments, the core material 418 includes astage B/C thermosetting resin. The materials are not limited to theseexamples and other suitable materials for the first laminate layer 416,the second laminate layer 420, and/or the core material 418 can be usedin other embodiments.

The substrate 460 further includes a first solder mask layer 424 coupledto the first laminate layer 416 and a second solder mask layer 422coupled to the second laminate layer 420, as shown. The first soldermask layer 424 and the second solder mask layer 422 generally comprise asolder resist material such as, for example, an epoxy. Other suitablematerials can be used to fabricate the first solder mask layer 424 andthe second solder mask layer 422 in other embodiments.

The substrate 460 further includes routing structures 426, 428, 430,432, and 434 respectively disposed in the first laminate layer 416, thecore material 418, the second laminate layer 420, the second solder masklayer 422, and the first solder mask layer 424. The routing structures426, 428, 430, 432, and 434 generally comprise an electricallyconductive material, e.g., copper, to route electrical signals of thedie 402. The electrical signals of the die 102 can include, for example,input/output (I/O) signals and/or power/ground for integrated circuit(IC) devices (not shown) formed on the die 402.

As shown, the routing structures 426, 428, 430, 432, and 434 can includeline-type structures to route the electrical signals within a layer ofthe substrate 460 and/or via-type structures to route the electricalsignals through a layer of the substrate 460. The routing structures426, 428, 430, 432, and 434 can include other configurations thandepicted in other embodiments. While a particular configuration has beendescribed and shown for the substrate 460, other substrates that usethree-dimensional (3D) packaging methods to embed one or more dies canbenefit from the principles described herein.

While not illustrated in the embodiments of FIGS. 1A-D, 2A-D and 3A-B,the die arrangement 400 (and thus, the die arrangements 102, 202 and302) can include one or more interposers 408. The die 402 and theinterposer 408 are embedded in the substrate 460, as shown in FIG. 4.According to various embodiments, the die 402 and the interposer 408 areembedded in the core material 418 between the first laminate layer 416and the second laminate layer 420. In accordance with variousembodiments, the interposer 408 can be formed by redistribution line(RDL) patterning as opposed to being embedded within the substrate 460.Other layers and/or structures within substrate 460 can also be createdby RDL patterning.

The die 402 comprises a semiconductor material, such as silicon, andgenerally includes IC devices (not shown), such as transistors for logicand/or memory or other circuitry, formed on an active side S1 of the die402. An inactive side S2 of the die 402 is disposed opposite to theactive side S1 of the die 402. The active side S1 and the inactive sideS2 generally refer to opposing surfaces of the die 402 to facilitate thedescription of various configurations described herein and are notintended to be limited to a particular structure of the die 402.

In some embodiments, a surface on the inactive side S2 of the die 402 isattached to the first laminate layer 416 using an adhesive 414 such as,for example, a resin. The die 402 can be coupled to the first laminatelayer 416 using other techniques, such as using a carrier group, inother embodiments.

The active side S1 of the die 402 has a surface comprising a dielectricmaterial 404. In some embodiments, the dielectric material 404 includesa low-k dielectric material having a dielectric constant that is smallerthan a dielectric constant of silicon dioxide. Low-k dielectricmaterials, such as those that are used to fabricate dies that includefeatures having a size of about 40 nanometers or less, may generallyhave material properties that are more susceptible to structural defectsfrom process-related stresses than non-low-k dielectric materials.According to various embodiments, the dielectric material 404 includessilicon dioxide doped with materials such as carbon or fluorine. Thedielectric material 404 can include other low-k dielectric materials inother embodiments.

The surface on the active side S1 of the die 402 further comprises oneor more bond pads 406 or analogous structures to route the electricalsignals of the die 402. The one or more bond pads 406 generally comprisean electrically conductive material such as, for example, aluminum orcopper. Other suitable materials can be used in other embodiments.

The interposer 408 is coupled to the surface of the die 402 (e.g., onthe active side S1) having the dielectric material 404 and the one ormore bond pads 406, as shown. The interposer 408 generally includes oneor more vias 410 formed in a semiconductor material such as silicon. Insome embodiments, the one or more vias 410 include through-silicon vias(TSVs), which pass completely through the interposer 408, as shown. Theone or more vias 410 are electrically coupled to the one or more bondpads 406 and are generally filled with an electrically conductivematerial, e.g., copper, to further route the electrical signals of thedie 402.

The interposer 408 can be bonded to the die 402 using, for example, athermal compression process or solder reflow process. In someembodiments, a metal or solder material that is coupled to the one ormore vias 408 is bonded to a metal or solder material disposed on theactive side S1 of the die 402. For example, thermal compression can beused to form a metal-metal bond between the interposer 408 and the die402 such as, for example, copper-to-copper, gold-to-copper, orgold-to-gold. Solder reflow can be used to form a solder bond such as,for example, solder-to-solder or solder-to-metal. A variety ofstructures can be used to form the bond such as, for example, bumps,pillars, and pads (e.g., the one or more bond pads 406) includingredistribution layer (RDL) pad configurations. Other suitable materials,structures, and/or bonding techniques can be used in other embodiments.

In some embodiments, the die 402 and the interposer 408 both comprise amaterial (e.g., silicon) having the same or similar coefficient ofthermal expansion (CTE). Using a material having the same or similar CTEfor the die 402 and the interposer 408 reduces stress associated withheating and/or cooling mismatch of the materials.

According to various embodiments, the interposer 408 is configured toprotect the dielectric material 404 of the die 402 from cracking orother defects associated with embedding the die 402 in the substrate460. For example, the formation of one or more layers (e.g., depositionof the core material 418) to embed the die 402 in the substrate 460 canproduce stresses that cause structural defects in the dielectricmaterial 404 of the die. The interposer 408 provides a physical buffer,support, and strengthening agent to the die 402 (e.g., the dielectricmaterial 404), particularly during the formation of the one or morelayers to embed the die 402 in the substrate 460. That is, the die 402coupled to the interposer 408 as described herein provides a protectedintegrated circuit structure 450 that is more structurally resilient tostresses associated with fabricating the substrate 460 than the die 402alone, resulting in improved yield and reliability of the die 402.Although embodiments have been generally described in connection withthe substrate 460 shown in FIG. 4, other substrate configurations thatbenefit from these principles are included in the scope of the presentdisclosure.

The routing structures 426, 428, 430, 432, and 434 are electricallycoupled to the one or more vias 410 to further route the electricalsignals of the die 402 throughout the substrate 460. For example, theone or more vias 410 can be electrically coupled to the routingstructures 428 that are disposed in a region of the core material 418using a fan-out, fan-in, or straight-up connection. In some embodiments,a redistribution layer 412 comprising an electrically conductivematerial, e.g., copper, is formed on the interposer 408 to route theelectrical signals between the one or more vias 410 and the routingstructures 428. The routing structures 426, 428, 430, 432, and 434 canbe used to provide electrical connections for the electrical signals ofthe die 402 on opposing surfaces of the substrate 460, as shown.

Additional structures can be formed to further route the electricalsignals of the die 402. For example, one or more bond pads 436 can beformed on a surface of the substrate 460. In the depicted embodiment,the one or more bond pads 436 are disposed in the first solder masklayer 424 and electrically coupled to the one or more vias 410. Althoughnot depicted, one or more bond pads can be formed in the second soldermask layer 422 in other embodiments. The one or more bond pads 436generally comprise an electrically conductive material such as copper oraluminum. Other electrically conductive materials can be used to formthe one or more bond pads 436 in other embodiments.

In some embodiments, one or more solder balls 438 or analogous packageinterconnect structures are formed on the one or more bond pads 436 tofacilitate electrical coupling of the die arrangement 400 with otherelectrical components, e.g., a printed circuit board such as amotherboard. According to various embodiments, the die arrangement 400is a ball-grid array (BGA) package. The die arrangement 400 can includeother types of packages in other embodiments.

FIG. 5 schematically illustrates a die 402 and an interposer 408 priorto being coupled together. The die 402 and the interposer 408 maycomport with embodiments already described in connection with FIG. 4.

The die 402 can be fabricated using well-known semiconductormanufacturing techniques. For example, the die 402 can be formed on awafer with multiple other dies where one or more IC devices (not shown),such as transistors, are formed on the active side S1 of the die 402.The dielectric material 404 and the one or more bond pads 406 aregenerally formed on a surface on the active side S1 of the die 402. Thewafer can be singulated to provide the die 402 in singulated form.

The interposer 408 can likewise be fabricated using well-knownsemiconductor manufacturing techniques. Similar to the die 402, theinterposer 408 can be formed on a wafer with multiple other interposers.One or more vias 410 such as, TSVs, can be formed through the interposer408 and/or a redistribution layer 412 can be formed on a surface of theinterposer 408. The wafer can be singulated to provide the interposer408 in singulated form.

The die 402 and the interposer 408 can be bonded together in singulatedor wafer form, or combinations thereof, according to a variety oftechniques. For example, the interposer 408 can be singulated and bondedto the die 402 in wafer form, or vice versa.

According to various embodiments, the interposer 408 is bonded to thedie 402 using a thermal compression process or a solder reflow processas described herein. That is, one or more electrically conductivestructures (e.g., pillars, bumps, pads, redistribution layer) are formedon the interposer 408 and the die 402 to form a bond between theinterposer 408 and the die 402. The one or more bond pads 406 of the die402 can be electrically coupled to the one or more vias 410 of theinterposer 408 using any suitable thermal compression process or solderreflow process to form a bond between the one or more electricallyconductive structures. The interposer 408 is bonded to the surface ofthe die 402 (e.g., on the active side S1) having the dielectric material404 and the one or more bond pads 406 disposed thereon, as indicated bythe arrow.

FIG. 6 schematically illustrates a die arrangement 600 subsequent toattaching a die 402 and an interposer 408 to a layer of a substrate(e.g., the substrate 460 of FIG. 4). In some embodiments, the layer ofthe substrate is a first laminate layer 416. The first laminate layer416 may comport with embodiments already described in connection withFIG. 4.

The die 402 can be attached to the first laminate layer 416 using anadhesive 414 to couple the inactive side S2 of the die 402 to the firstlaminate layer 416. The adhesive 414 may comport with embodimentsalready described in connection with FIG. 4. The die 402 can be attachedto the layer of the substrate using other techniques (e.g., a carriergroup) in other embodiments.

FIGS. 7-11 schematically illustrate a die arrangement subsequent toforming one or more additional layers of the substrate to embed the diein the substrate. Die arrangement 700 of FIG. 7 represents the diearrangement 600 of FIG. 6 subsequent to forming a core material 418 ofthe substrate (e.g., the substrate 460 of FIG. 4). The core material 418may comport with embodiments already described in connection with FIG.4.

The core material 418 can be deposited to encapsulate the die 402 andthe interposer 408 as shown. For example, the core material 418 can beformed by depositing a thermosetting resin into a mold.

According to some embodiments, the interposer 408 is disposed to protectthe dielectric material 404 of the die 402 from stress associated withdeposition of the core material 418. The interposer 408 on the die 402forms a protected IC structure 450 as described in connection with FIG.4.

In some embodiments, routing structures 428 are formed on the firstlaminate layer 416 prior to depositing the core material 418. Therouting structures 428 can be formed on the first laminate layer 416prior to attaching the die 402 to the first laminate layer 416. Therouting structures 428 may comport with embodiments already described inconnection with FIG. 4.

Die arrangement 800 of FIG. 8 represents the die arrangement 700 of FIG.7 subsequent to patterning the core material 418 and forming additionalrouting structures 428, as shown, and routing structures 430. Therouting structures 430 may comport with embodiments already described inconnection with FIG. 4.

The core material 418 can be patterned using any suitable process, e.g.,lithography/etch or laser-drilling, to remove portions of the corematerial 418. Portions of the core material 418 are removed to allowdeposition of an electrically conductive material to form the routingstructures 428,430. For example, the core material 418 can be patternedto facilitate formation of an electrical connection with the one or morevias 410 of the interposer 408 through the core material 418. Theelectrical connection can be formed, for example, by depositing anelectrically conductive material to form the routing structures 428, 430that are electrically coupled to the one or more vias 410 through theredistribution layer 412, as shown.

Die arrangement 900 of FIG. 9 represents the die arrangement 800subsequent to forming a second laminate layer 420 on the core material418. The second laminate layer 420 may comport with embodiments alreadydescribed in connection with FIG. 4.

The second laminate layer 420 can be formed by depositing a laminatematerial on the core material 418 and patterning the laminate materialto facilitate formation of an electrical connection with the one or morevias 410 of the interposer 408 through the laminate material. Forexample, an electrically conductive material can be deposited into thepatterned areas of the second laminate layer 420 where the laminatematerial has been removed to form additional routing structures 430, asshown. The routing structures 430 provide an electrical connection tothe one or more vias 410 through the second laminate layer 420.

Die arrangement 1000 of FIG. 10 represents the die arrangement 900subsequent to forming a solder mask layer (e.g., the second solder masklayer 422 of FIG. 4) on the second laminate layer 420. The second soldermask layer 422 may comport with embodiments described in connection withFIG. 4.

Routing structures 432 can be formed by deposition and/or patterning ofan electrically conductive material on the second laminate layer 420.The routing structures 432 may comport with embodiments described inconnection with FIG. 4. A solder resist material can be deposited and/orpatterned to form the second solder mask layer 422. The solder resistmaterial can be formed such that some of the routing structures 432 areexposed for further electrical connection.

Die arrangement 1100 of FIG. 11 represents the die arrangement 1000subsequent to forming routing structures 426 in the first laminate layer416 and subsequent to forming a solder mask layer (e.g., the firstsolder mask layer 424 of FIG. 4) on the first laminate layer 416. Thefirst solder mask layer 424, one or more bond pads 436, one or moresolder balls 438, and routing structures 426, 434 may comport withembodiments described in connection with FIG. 4.

In some embodiments, the first laminate layer 416 is patterned tofacilitate formation of an electrical connection with the one or morevias 410 of the interposer 408 through the first laminate layer 416. Anelectrically conductive material can be deposited into the patternedportions of the first laminate layer to form the routing structures 426that provide the electrical connection with the one or more vias 410.

The routing structures 434 are formed on the first laminate layer 416and electrically coupled to the routing structures 426 to route theelectrical signals of the die 402. The one or more bond pads 436 areformed on the routing structures 426. A solder resist material isdeposited and/or patterned to form the solder mask layer 424. Openingsmay be formed in the solder resist material to allow formation/placementof solder balls 438 on the one or more bond pads 434.

The packaging arrangements 100, 200 and 300 as described hereingenerally can have a thickness of approximately 1.2 millimeters.Furthermore, the separation of the second die 108, 208 and 308(configured with one or more SoCs) and the first die(s) 104, 204 a,b and304 a-d (when in the form of memory) results in less heat from thesecond die affecting the performance of the first die(s). The heat sink118, 218 and 318, as well as the heat transfer compound 120, 220 and320, also help keep heat from the second die affecting the performanceof the first die(s).

FIG. 12 illustrates an example method 1200, in accordance with anembodiment of the present disclosure. At a first die is provided suchthat the first die has a surface comprising a bond pad to routeelectrical signals of the first die. At 1208, the first die is attachedto a layer of a substrate. At 1212, one or more additional layers of thesubstrate are formed to embed the first die in the substrate. At 1216, asecond die is coupled to the one or more additional layers, where thesecond die has a surface comprising a bond pad to route electricalsignals of the second die. In an embodiment, the second die is coupledto the one or more additional layers such that electrical signals arerouted between the first die and the second die.

The description may use perspective-based descriptions such as up/down,over/under, and/or top/bottom. Such descriptions are merely used tofacilitate the discussion and are not intended to restrict theapplication of embodiments described herein to any particularorientation.

For the purposes of the present disclosure, the phrase “A/B” means A orB. For the purposes of the present disclosure, the phrase “A and/or B”means “(A), (B), or (A and B).” For the purposes of the presentdisclosure, the phrase “at least one of A, B, and C” means “(A), (B),(C), (A and B), (A and C), (B and C), or (A, B and C).” For the purposesof the present disclosure, the phrase “(A)B” means “(B) or (AB)” thatis, A is an optional element.

Various operations are described as multiple discrete operations inturn, in a manner that is most helpful in understanding the claimedsubject matter. However, the order of description should not beconstrued as to imply that these operations are necessarily orderdependent. In particular, these operations may not be performed in theorder of presentation. Operations described may be performed in adifferent order than the described embodiment. Various additionaloperations may be performed and/or described operations may be omittedin additional embodiments.

The description uses the phrases “in an embodiment,” “in embodiments,”or similar language, which may each refer to one or more of the same ordifferent embodiments. Furthermore, the terms “comprising,” “including,”“having,” and the like, as used with respect to embodiments of thepresent disclosure, are synonymous.

The terms chip, integrated circuit, monolithic device, semiconductordevice, die, and microelectronic device are often used interchangeablyin the microelectronics field. The present invention is applicable toall of the above as they are generally understood in the field.

Although certain embodiments have been illustrated and described herein,a wide variety of alternate and/or equivalent embodiments orimplementations calculated to achieve the same purposes may besubstituted for the embodiments illustrated and described withoutdeparting from the scope of the present disclosure. This disclosure isintended to cover any adaptations or variations of the embodimentsdiscussed herein. Therefore, it is manifestly intended that embodimentsdescribed herein be limited only by the claims and the equivalentsthereof.

What is claimed is:
 1. A method comprising: providing a first die having (i) a first surface, (ii) a second surface that is opposite to the first surface, (iii) a third surface that is perpendicular to the first surface, and (iii) a fourth surface that is perpendicular to the first surface, wherein the second surface of the first die comprises a first bond pad, wherein the first bond pad of the first die is configured to route electrical signals of the first die; attaching the first surface of the first die to a layer of a substrate; attaching the second surface of the first die to a first surface of an interposer, wherein the interposer comprises a first via, and wherein the interposer has (i) the first surface, and (ii) a second surface that is opposite to the first surface, (iii) a third surface that is perpendicular to the first surface, and (iii) a fourth surface that is perpendicular to the first surface; forming one or more additional layers of the substrate to embed the first die and the interposer in the substrate such that the one or more additional layers of the substrate is attached to (i) the third surface and the fourth surface of the first die and (ii) the third surface and the fourth surface of the interposer; and coupling a second die to the one or more additional layers of the substrate, wherein the second die has a surface comprising a second bond pad, and wherein the second bond pad of the second die is configured to route electrical signals of the second die, wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between the first die and the second die via (i) the first bond pad of the first die, (ii) the first via of the interposer, (iii) a routing structure that is in part disposed within the one or more additional layers of the substrate, and (iv) the second bond pad of the second die.
 2. The method of claim 1, wherein coupling the second die to the one or more additional layers of the substrate comprises: coupling the second die to the one or more additional layers of the substrate using solder balls.
 3. The method of claim 2, further comprising: providing underfill material between (i) the second die and (ii) the one or more additional layers of the substrate.
 4. The method of claim 1, further comprising: coupling a heat sink to the second die, wherein the second die is coupled to the one or more additional layers of the substrate at a first surface of the second die, and wherein the heat sink is coupled to the second die at a second surface of the second die that is opposite to the first surface of the second die.
 5. The method of claim 1, further comprising: providing a third die, wherein the third die has a surface comprising a third bond pad, and wherein the third bond pad is configured to route electrical signals of the third die; and attaching the third die to a layer of the substrate, wherein forming the one or more additional layers of the substrate to embed the first die and the interposer in the substrate includes forming the one or more additional layers of the substrate to embed the third die in the substrate, and wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between (i) the third die and (ii) the second die.
 6. The method of claim 5, wherein providing the third die comprises providing the third die beside the first die in a substantially side-by-side arrangement.
 7. The method of claim 5, wherein providing the third die comprises providing the third die over the first die such that the third die and the first die are in a substantially stacked arrangement.
 8. The method of claim 7, further comprising: providing a fourth die, wherein the fourth die has a surface comprising a fourth bond pad, and wherein the fourth bond pad is configured to route electrical signals of the fourth die; and providing a fifth die, wherein the fifth die has a surface comprising a fifth bond pad, and wherein the fifth bond pad is configured to route electrical signals of the fifth die, wherein the third die is provided over the first die such that the third die and the first die are in a substantially stacked arrangement, wherein the fifth die is provided over the fourth die such that the fifth die and the fourth die are in a substantially stacked arrangement, wherein (i) the first die and the third die are arranged in a substantially side-by-side arrangement, and (ii) the fourth die and the fifth die are arranged in a substantially side-by-side arrangement, wherein forming the one or more additional layers of the substrate to embed the first die in the substrate includes forming the one or more additional layers of the substrate to embed (i) the fourth die and (ii) the fifth die in the substrate, wherein the second die is coupled to the one or more additional layers such that electrical signals are routed between (i) the fourth die and (ii) the second die, and wherein the second die is coupled to the one or more additional layers such that electrical signals are routed between (i) the fifth die and (ii) the second die.
 9. The method of claim 1, further comprising: forming one or more routing structures such that the one or more routing structures electrically couple (i) the first bond pad of the first die with (ii) the second bond pad of the second die.
 10. The method of claim 9, wherein the one or more routing structures are embedded within the one or more additional layers of the substrate.
 11. The method of claim 1, wherein at least a part of the one or more additional layers of the substrate separates the first die and the interposer from the second die.
 12. The method of claim 1, wherein a die package comprises the first die, the second die, and the substrate, and wherein the method further comprises: forming a first one or more routing structures that connects the second die to a first device that is external to the die package.
 13. The method of claim 1, wherein the first die is a memory die.
 14. The method of claim 1, wherein: the layer of the substrate is a first layer of the substrate; the one or more additional layers of the substrate comprises (i) a core material layer and (ii) a second layer; and the second surface of the interposer, which is opposite the first surface of the interposer, faces the second layer of the substrate.
 15. The method of claim 14, wherein: at least a part of the core material layer separates at least a section of the second surface of the interposer from the second layer.
 16. A method comprising: providing a first die having (i) a first surface and (ii) a second surface that is opposite to the first surface, wherein the second surface of the first die comprises a first bond pad, wherein the first bond pad of the first die is configured to route electrical signals of the first die; attaching the first surface of the first die to a layer of a substrate; attaching the second surface of the first die to an interposer, wherein the interposer comprises a first via; forming one or more additional layers of the substrate to embed the first die and the interposer in the substrate; and coupling a second die to the one or more additional layers of the substrate, wherein the second die has a surface comprising a second bond pad, and wherein the second bond pad of the second die is configured to route electrical signals of the second die, wherein the second die is coupled to the one or more additional layers of the substrate such that electrical signals are routed between the first die and the second die via (i) the first bond pad of the first die, (ii) the first via of the interposer, (iii) a routing structure that is in part disposed within the one or more additional layers of the substrate, and (iv) the second bond pad of the second die, wherein the layer of the substrate is a first laminate layer, and wherein the one or more additional layers of the substrate comprises (i) a second laminate layer and (ii) a core material layer that is disposed between the first laminate layer and the second laminate layer.
 17. The method of claim 16, wherein: the first surface of the first die is coupled to the first laminate layer; the second surface of the first die is attached to a first surface of the interposer; a second surface of the interposer is opposite the first surface of the interposer; the second surface of the interposer faces the second laminate layer; the first die and the interposer are embedded in the core material of the substrate such that the core material separates at least a section of the second surface of the interposer from the second laminate layer; and the second die is coupled to the second laminate layer.
 18. The method of claim 1, wherein: the layer of the substrate is a first laminate layer; and the one or more additional layers of the substrate comprises (i) a second laminate layer and (ii) a core material layer that is disposed between the first laminate layer and the second laminate layer.
 19. The method of claim 18, wherein: the first surface of the first die is coupled to the first laminate layer; the second surface of the first die is attached to a first surface of the interposer; a second surface of the interposer is opposite the first surface of the interposer; the second surface of the interposer faces the second laminate layer; the first die and the interposer are embedded in the core material of the substrate such that the core material separates at least a section of the second surface of the interposer from the second laminate layer; and the second die is coupled to the second laminate layer.
 20. The method of claim 1, wherein forming the one or more additional layers of the substrate further comprises: forming the one or more additional layers of the substrate such that the one or more additional layers of the substrate is not formed between the second surface of the first die and the first surface of the interposer.
 21. The method of claim 1, wherein attaching the second surface of the first die to the first surface of the interposer further comprises: attaching the second surface of the first die to the first surface of the interposer such that no underfill material is disposed in between the second surface of the first die and the first surface of the interposer.
 22. The method of claim 1, wherein: the layer of the substrate is a first layer of the substrate; and the one or more additional layers of the substrate comprises (i) a core material layer and (ii) a second layer, wherein forming the one or more additional layers of the substrate comprises forming the core material layer such that the core material layer is attached to (i) the third surface and the fourth surface of the first die and (ii) the third surface and the fourth surface of the interposer. 